DAIHEN FRM-30A 40.68M/12.88MHz 3KW

RF AUTO MATCHER

The electronics market today always looks for higher-density and highly integrated semiconductor devices as well as high resolution FPDs with larger scaling.To achieve those high performance on devices, sophisticatedly controlled damage-less plasma is required with well-controlled repeatability. DAIHEN has been contributing to meet these requirements for next generation plasma processing by providing high performance products with field-proven reliability. All of DAIHEN products are designed using leading-edge technology as well as long term experience in actual plasma application, and tested and evaluated on actual plasma apparatus. We have been proposing the “Fine Plasma Technology”, and pursue the ideal plasma by providing variety of power generators and matching equipment.

■ Stable 2-level pulsed output and excellent power output linearity 　 achieved by fully digital control.

■ Stable and high speed automatic matching for pulsed output by integrating with our fully digital controlled automatic matching unit.

■ Excellent product reliability and mass production capability.