SM5652-003-D-3-SR

Compensated Low Pressure, Constant Voltage (SM5652)

The SM5652 Series is temperature compensated and calibrated in a ceramic  DIP. The series is available in full scale pressure ranges from 0.15 to  1.5 PSI (1 to 10 kPa).

  SM5652系列为陶瓷基底贴装高稳定压阻压力传感器芯片，利用陶瓷基底上的厚膜电阻可进行零度校正和温度补偿.

特点：   微压0.15psi、0.30psi、0.80psi、1.50psi、和3.0psi

l         恒流或恒压激励

l         温度补偿范围宽（0-60℃）

l         跨度校准正高达±2%

l         零点校准及温度补偿

l         高性能、稳定的硅芯片封装

l         表压和差压配置

应用:
1、医疗设备 呼吸机、麻醉机和监护仪
2、HVAC（空调）
3、水平监测
4、流量测量
5、工业控制
6、微差压变送器
7、泄漏仪、泄漏检测
8、差压变送器
9、压力校验仪
10、大气采样器
11、气相色谱仪、液相色谱仪
12、风压机
13、印染、纺织设备
14、风洞试验
15、臭氧分析仪
16、高铁产品

备注：
1、正压指的是从晶圆底部进入；增益，在工厂校准使用的是负压
2、对于SM5652,量程为0.15psi的满量程输出是23.75mV(最小)至26.25（）
3、测量温度超过22~58℃　对于量程为0.15psi，满量程温度系数为±2%FS；零
点温度系数为±2%FS；对于量程为0.3psi，满量程温度系数为±0.75%FS
4、对于量程为0.3psi，迟滞性为±0.45%FS；对于量程为0.15psi，迟滞性为±
0.65%FS
5、直线拟合，是从晶圆顶部测量的　对于量程为0.3psi，线性度为
±0.5%FS；对于量程为0.15psi，线性度为±2.5%FS
6、灵敏度匹配指的是部分与部分匹配的程度，对于量程为0.15psi，灵敏度匹

配性为5.0%FS

SM5652-003-G-3-LR
SM5652-008-G-3-LR
SM5652-015-D-3-SR
SM5652-001-G-3-LR
SM5652-008-D-3-SR
SM5652-001-D-3-SR
SM5652-008-G-3-SR
SM5652-003-D-3-SR
SM5652-008-D-3-LR
SM5652-003-G-3-SR
SM5652-015-D-3-LR
SM5652-015-G-3-LR
SM5652-003-D-3-LR
SM5652-015-G-3-SR
SM5652-001-G-3-SR
SM5652-001-D-3-LR
SM5652-001-D-3-NR
SM5652-001-D-3-LHR
SM5652-015-D-3-NR
SM5652-002-G-3-SR
SM5652-008-D-3-NR

SM5651-008-D-3-SR
SM5651-001-G-3-LR
SM5651-003-D-3-SR
SM5651-001-D-3-SR
SM5651-008-G-3-SR
SM5651-008-D-3-LR
SM5651-015-G-3-LR
SM5651-003-D-3-LR
SM5651-003-G-3-SR
SM5651-015-D-3-LR
SM5651-015-D-3-SR
SM5651-003-G-3-LR
SM5651-008-G-3-LR
SM5651-015-G-3-SR
SM5651-001-D-3-LR
SM5651-001-G-3-SR
SM5651-003-D-3-NR
SM5651-030-D-3-SR
SM5652-003-G-3-LR
SM5652-008-G-3-LR
SM5652-015-D-3-SR
SM5652-001-G-3-LR
SM5652-008-D-3-SR
SM5652-001-D-3-SR
SM5652-008-G-3-SR
SM5652-003-D-3-SR
SM5652-008-D-3-LR
SM5652-003-G-3-SR
SM5652-015-D-3-LR
SM5652-015-G-3-LR
SM5652-003-D-3-LR
SM5652-015-G-3-SR
SM5652-001-G-3-SR
SM5652-001-D-3-LR
SM5652-001-D-3-NR
SM5652-001-D-3-LHR
SM5652-015-D-3-NR
SM5652-002-G-3-SR
SM5652-008-D-3-NR
SM5102-005-GX
SM5102-015-GX
SM5102-015-AX
SM5102-030-GX
SM5102-030-AX
SM5102-060-GX
SM5102-060-AX
SM5102-100-GX
SM5102-100-AX
SM5103-003-GX
SM5103-008-GX
SM5103-015-GX
SM5108C-015-AX
SM5108C-030-AX
SM5108C-060-AX
SM5108C-150-AX
SM5420C-015-A-H-T
SM5420C-015-A-P-T
SM5420C-030-A-H-T
SM5420C-015-A-P-T
SM5420C-060-A-H-T
SM5420C-060-A-P-T
SM5420C-100-A-H-T
SM5420C-100-A-H-T
SM5470-001-G-C-TR
SM5470-001-G-B
SM5470-003-D-C
SM5470-001-D-B
SM5470-001-D-C-TR
SM5470-003-G-B-TR
SM5470-001-G-C
SM5470-008-D-B
SM5470-001-D-B-TR
SM5470-003-D-C-TR
SM5470-003-D-B-TR
SM5470-003-G-B
SM5470-001-G-B-TR
SM5470-003-D-B
SM5470-008-D-B-TR
SM5470-030-G-C
SM5470-030-D-C
SM5470-015-G-B
SM5470-008-G-C
SM5430-015-G-B
SM5430-030-D-B
SM5611-015-G-3-LR
SM5611-060-D-3-SR
SM5612-015-A-5-NR
SM5612-060-D-3-NR
SM5812-005-A-3-LR
SM5812-005-D-3-LR
SM5812-005-S-3-LR
SM5812-015-D-3-LR
SM5812-015-G-3-LR
SM5812-030-D-3-LR
SM5812-030-G-3-LR
SM5812-030-G-3-SR
SM5812-060-A-3-LR
SM5812-060-G-3-LR
SM5812-100-G-3-LR
SM5812-100-G-3-SR
SM5812-100-S-3-LR
SM5822-015-D-B
SM5822-015-A-B-TR
SM5822-015-S-B-TR
SM5822-060-A-B-TR
SM5822-015-S-B
SM5822-015-D-B-TR
SM5822-060-A-B
SM5822-015-A-B
SM5822-100-D-B
SM5822-100-G-B
SM5822-015-G-B
SM5822-100-S-B
SM5852-001-D-3-LR
SM5852-001-S-3-LR
SM5852-003-D-3-LR
SM5852-003-S-3-LR
SM5852-004-S-3-SR
SM5852-015-G-3-LR
SM5882-006-D-B
SM5882-006-G-B
SM5882-006-S-B
SM5882-015-D-B
SM5882-015-G-B
SM5882-015-S-B
SM6842-015-A-C-S
SM9221-030-A-D
SM9221-060-A-D
SM9221-150-A-D
SM9221-300-A-D
SM9541-010C-S-C-3-S
SM9541-010C-D-C-3-S
SM9541-020C-S-C-3-S
SM9541-020C-D-C-3-S
SM9541-040C-S-C-3-S
SM9541-040C-D-C-3-S
SM9541-100C-S-C-3-S
SM9541-100C-D-C-3-S
SM9543-005M-D-C-3-S
SM5420-015-A-H-T
SM5420-030-A-H-T
SM5420-060-A-H-T
SM5420-100-A-H-T
SM5882-006-D-B
SM5882-006-S-B
SM5882-015-D-B
SM5882-015-S-B
SM5420C-015-A-H-T
SM5420C-015-A-P-T
SM5420C-030-A-H-T
SM5420C-030-A-P-T
SM5420C-060-A-H-T
SM5420C-060-A-P-T
SM5420C-100-A-H-T
SM5420C-100-A-P-T
SM5470-001-D-B
SM5470-001-G-B
SM5470-001-D-C
SM5470-003-D-B
SM5651-001-D-3-LR
SM5651-001-D-3-SR
SM5651-003-D-3-SR
SM5651-015-D-3-SR
SM5652-001-D-3-LR
SM5652-001-D-3-SR
SM5652-003-D-3-LR
SM5652-003-D-3-SR
SM5652-003-G-3-SR
SM5652-008-D-3-SR
SM5652-015-D-3-LR
SM5652-015-D-3-SR
SM5852-015W-D-3-LR
SM5852-001-D-3-LR
SM5852-001-S-3-LR
SM5852-003-D-3-LR
SM5852-008-G-3-SR
SM5852-003-S-3-LR
SM5852-004-S-3-SR
SM5852-015-G-3-LR
SM5822-015-A-B
SM5822-015-D-B
SM5822-015-G-B
SM5822-015-S-B
SM5822-060-A-B
SM5102-005-GX
SM5102-015-GX
SM5102-015-AX
SM5102-030-GX
SM5102-030-AX
SM5102-060-GX
SM5102-060-AX
SM5102-100-GX
SM5102-100-AX
SM5103-003-GX
SM5103-008-GX
SM5103-015-GX
SM5106-015-AX
SM5106-030-AX
SM5106-060-AX
SM5106-150-AX
SM5108C-015-AX
SM5108C-030-AX
SM5108C-060-AX
SM5108C-150-AX
SM9221-150-A-D
SM9221-300-A-D
SM2120-005-G-D
SM5470-003-D-C
SM5470-008-D-B
SM5470-008-D-C
SM5420C-015-A-H-T
SM5420C-015-A-P-T
SM5420C-030-A-H-T
SM5420C-030-A-P-T
SM5420C-060-A-H-T
SM5420C-060-A-P-T
SM5420C-100-A-H-T
SM5420C-100-A-P-T
SM5852-001-D-3-LR
SM5852-003-D-3-LR
SM5852-003-S-3-LR
SM5852-004-S-3-LR
SM5852-008-G-3-SR
SM5852-015-G-3-LR
SM5882-006-D-B
SM5882-006-S-B
SM5882-015-D-B
SM5882-015-S-B
SM5103-015-GX
SM5102-005-GX
SM5470-001-D-B
SM5470-001-G-B
SM5470-003-D-B
SM5470-008-D-B
SM5420C-015-A-H-T
SM5420C-015-A-H-T
SM5420C-015-A-P-T
SM542C-030-A-H-T
SM5420C-030-A-P-T
SM5420C-060-A-H-T
SM5420C-060-A-P-T
SM5420C-100-A-H-T
SM5420C-100-A-P-T
SM6841-015-A-H-T
SM6841-030-A-H-T
SM6841-060-A-H-T
SM6841-100-A-H-T
SM6841-015-A-H-S
SM6841-030-A-H-S
SM6841-060-A-H-S
SM6841-100-A-H-S
SM9541-010C-S-C-3-S
SM9541-010C-D-C-3-S
SM9541-020C-S-C-3-S
SM9541-020C-D-C-3-S
SM9541-040C-S-C-3-S
SM9541-040C-D-C-3-S
SM9541-100C-S-C-3-S
SM9541-100C-D-C-3-S