AMAT3930-00855 VoDMC-33650 Metal Steip Chamber VODM 797-004456-005 mks流量计

料号：4050040131

Metal Steip Chamber VODM 797-004456-005

水蒸气流量传感器

VoDM Summary

VPN MKS P/N Description Current Status

3930-00855 VoDMC-33650 

3930-00114  

AMAT3930-00082 

3930-01147 

797-004456-005 VoDMB-26565 Obsoletedreplaced by797-004456-008

Ordering Information

Vapor on Demand Module

model number example 

Type Number VODMA

Flow Range Full Scale(sccm of Water Vapor)

1000 sccm Water Vapor 13C

3000 sccm Water Vapor 33C

Fittings

4 VCR Male Iniet, 8 VCR Male Outlet R

Valve

Normally Closed Valves 1

Connector

15-pin Tvpe"D" Electrical Connector B

Seal Materials Ethylene-Propylene Elastomers E