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SM150 手动匀胶

功能(基本配置)

可编程，最多 50 个程序(各包含 24 个程序段)

适用于重复工艺的快速启动功能

触摸屏面板控制，方便用户程序配置

工艺参数：转速、加速度、工艺时间

旋转方向可选 (顺时针、逆时针)

手动装卸基板

通过具有安全保护的真空系统进行基板固定

手动盖子带有空气入口和闭合安全保护

工艺结束时的声音信号

性能数据

转速范围：0 到 10,000rpm +/-1rpm

转速加速度：0–8,000rpm 为0.8秒/0–10,000rpm为1秒 1)

减速度：10,000rpm-0 为2.5秒/8,000rpm-0 为0.8秒 1)

工艺时间最长为 2376 s

每个程序段的给胶时间为 99 s

取决于基板尺寸和旋转卡盘的型号

SM 200 匀胶机

FEATURES (BASIC CONFIGURATION) ? Up to 50 programmes with 24 segments each can be programmed ? Quick start function for repeat processes ? User-friendly process configuration with touch screen panel ? Process parameters: speed, acceleration, time ? Rotational direction can be selected (CW, CCW) ? RCCT system (Round-Closed-Chamber-Technology) ? Dynamic dispense arm prepared for up to 4 media lines ? Manual loading and unloading of the substrates ? Substrate fixation via vacuum and safety interlock protection ? Acoustic signal when the process has finished PERFORMANCE DATA ? Speed range: 1 to 6’000rpm +/-1rpm (optional 10’000rpm for wafers smaller than 8") ? Difference from set rotation speed to actual value <+/-1% ? Speed acceleration: 0 – 6’000rpm in 0,6 sec. ? Delay: 6’000rpm – 0 in 0,6 sec. ? Process time up to 9’999 seconds with 0,1 sec. steps ? Dosing time 999 seconds/segment SPIN CHUCK RANGE The Spin Chuck range by SAWATEC offers an optimum selection for all substrate sizes and materials to switch seamlessly from one Spin Chuck size and design to the next. To ensure that the reverse side of the substrate does not become contaminated, it is the  crucial to select the optimum spin chuck size and specific chuck design. Replacing the spin chucks is very easy and does not require  any tools. Depending on the application, one-piece or two-piece, vacuum or mechanical spin chucks with optical centring aid are used. ? Vacuum chuck specimen ? Vacuum chuck 1” to 3” round ? Vacuum chuck 100mm (4”) to 200mm (8”) ? Vacuum chuck 100x100mm (4”x4”) ? Vacuum chuck 125x125mm (5”x5”) ? Vacuum chuck 150x150mm (6”x6”) ? Further chucks on request
HP150 热板

特点（基本配置）              

数字目标与实际值显示的温度控制            

自动温度限位开关，无过热现象             

带安全玻璃的加热板，易于清洁              

加热板容易调平，防止光刻胶放电              

真空手动固定基板              

人工装卸基板              

性能数据              

温度范围：环境温度高达250°C              

温度精度：100°C时+1°C              

附加功能（选项）              

N2冲洗手动控制，无氧化             

 一个简单的热板对齐设置工具